Browse Penn-owned technologies available for licensing.
In this dual-beam switch, an electric field is used to control the actuation of a thin aluminum nitride piezoelectric membrane. The two beams of the switch are pushed toward each other in the closed state and pushed apart in the open state via the piezoelectric action. Both beams are actuated simultaneously, which avoids the problems other MEMS switches face from residual stress and inconsistent air gap. The resulting design has a low switching voltage (<20V) and fast switching times (<2 μs). The design of this switch is compatible with CMOS fabrication, allowing for easier on-chip integration.