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Efficient, scalable and CMOS-compatible nonlinear photonic device based on AlScN

An on-chip nonlinear optical device that uses AlScN films to undergo scalable manufacturing processes

Published: 1/31/2024

Inventor(s):

Valerie Yoshioka, Roy Olsson, Bo Zhen, Jian Lu, Zichen Tang, jicheng jin

Keywords(s):

Electronic Materials, Optics & Photonics

Category(s):

Technology Classifications > Hardware & Components, Technology Classifications > Materials